IP für MEMSLecture for the GI/GMM/ITG trade conference in BoeblingenL.M.Voßkämper, G.Pelz
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Abstract Analytical modeling for electromechanics sometimes requires features like the representation of bended struc- tures, the inclusion of (moving) boundary conditions or spatial integrations and differentiations. All these points are currently not directly addressed in VHDL-AMS and other analog hardware description languages. This paper illustrates this, using the example of a capacitive pressure sensor. The