Jun 16, 1999

Electromechanical Modeling beyond VHDL-AMS
IEEE/ACM International Workshop on Behavioral Modeling and Simulation (BMAS), Orlando, Florida, USA
L.M.Voßkämper, A.Lüdecke, M.Leineweber, G.Pelz


Analytical modeling for electromechanics sometimes requires features like the representation of bended struc- tures, the inclusion of (moving) boundary conditions or spatial integrations and differentiations. All these points are currently not directly addressed in VHDL-AMS and other analog hardware description languages. This paper illustrates this, using the example of a capacitive pressure sensor. The behavior of the introduced model is verified with finite element analysis…

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